Thin films of polycrystalline silicon, or polysilicon (also known as poly- Si or poly) , are widely used as MOS transistor gate electrodes and for interconnection in MOS circuits. It is also used as resistor, as well as in ensuring ohmic contacts for shallow junctions. When used as gate electrode, a metal (such as tungsten) or metal silicide (such as tantalum silicide) may be deposited over it to enhance its conductivity. Spec:
